Preparation of low-dielectric-constant ceramics using kaolin clay
The development of ultra-large-scale integrated circuits have allowed semiconductor device components to shrink in size. Low dielectric constant materials are essential for interconnections as well as reduction of crosstalk noise and power consumption in these smaller devices. Although researchers traditionally have used SiO2 as the main dielectric material,1 their studies have also explored many low-dielectric-constant materials,2–4 such as Si3N4–SiO2 ceramics and zeolite films.5
Kaolin clay is a naturally abundant composition of hydrated aluminum silicates [i.e, Al4(Si4O10)(OH)2] that consists primarily of SiO2 and Al2O3. High-temperature treatment converts kaolin clay to mullite and free silica, which together form strong internal bonds that result in excellent strength. Therefore, kaolin is used worldwide for applications such as clay ceramics,6 zeolites for nicotine7,8 and asphaltene9 adsorption, and substrate insulation.10 Kaolin also is relatively inexpensive,11–13 so it has significant potential as a low-dielectric-constant material.