Sustainable transition of the semiconductor industry

The semiconductor industry is fundamental to contemporary technological advancement, powering everything from mobile phones and computers to electric vehicles and artificial intelligence applications.

Semiconductor manufacturing is resource intensive, involving high energy consumption, extensive chemical use, and significant emissions of greenhouse gases, notably fluorinated gases, which possess a high global warming potential. The sector emitted approximately 64.24 million tons of CO₂-equivalent gases in 2020 alone,¹ accounting for a significant portion of emissions from the broader information and communication technology industry.² Addressing these emissions is crucial for the industry’s sustainable transition.

Process optimization and technological innovation are key drivers of carbon mitigation in the semiconductor industry, enabling the sector to meet growing demand while minimizing its environmental impact. Artificial intelligence technologies offer significant potential for enabling real-time monitoring and dynamic process optimization in semiconductor manufacturing. For instance, in chemical vapor deposition chamber cleaning processes, AI-enabled plasma-based techniques can serve as an alternative to traditional endpoint detection in etching procedures involving fluorinated gases.³

In addition to optimization, substituting gases with high global warming potentials with lower-impact alternatives is an effective mitigation strategy.⁴ However, this approach is often impractical in numerous plasma etching processes.⁵ Therefore, when assessing alternative chemicals, it is crucial to consider more than just their environmental impact. A thorough evaluation must include safety and health risks related to factory operations, employee protection, and the surrounding environment. This systemic method guarantees that the selected alternatives successfully cut greenhouse gas emissions, meet safety regulations, and support the long-term health and stability of the semiconductor manufacturing ecosystem.

Beyond fabrication, design innovations in low-power integrated circuits are helping to reduce the energy consumption of semiconductor devices themselves. Techniques such as dynamic voltage scaling and power gating are increasingly used to maintain performance while lowering operational energy use.⁶

Furthermore, waste heat recovery and reuse technologies have become widely adopted in the semiconductor industry. Recently, some prominent semiconductor manufacturers have begun implementing waste heat recovery systems, converting excess heat from production into usable energy for heating or other manufacturing processes.⁷

Supply chain management and optimization are crucial for carbon reduction in the semiconductor industry. The supply chain spans multiple stages, from raw material procurement to product delivery, with emissions generated at each step. Due to the complexity and multi-tiered nature of the supply chain, effectively reducing its carbon footprint requires comprehensive optimization from upstream to downstream, particularly in green procurement, logistics optimization, and intelligent supply chain management.

Finally, supply chain collaboration and standardization are effective strategies for driving overall carbon reduction in the semiconductor industry. For example, the Semiconductor Industry Association (SIA) and other relevant industry organizations are establishing unified emission reduction standards and encouraging green collaboration among companies.⁸

Decarbonizing the semiconductor industry is an urgent and multifaceted challenge that demands coordinated, systemic solutions. Ultimately, technological progress alone will not be sufficient. A successful transition demands collaborative engagement from all stakeholders, including manufacturers, suppliers, policymakers, and researchers.

NOTE: This article is excerpted from “Sustainable transition of the global semiconductor industry: Challenges, strategies, and future directions,” Sustainability 2025, 17(7): 3160. (CC BY 4.0)

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